Development of Phase-Field Models for Simulating the Vapor Deposition and Microstructure Evolution of Thin Films

Student: James Stewart

Degree: Ph.D., May 2016

Major Professor: Dr. Douglas Spearot

Research Area(s):

Conventional Materials & Processes

Modeling & Simulation

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Background/Relevance

  • Develop and employ mesoscale simulations to investigate microstructure evolution (e.g., phase distribution, GBs, grain orientation, etc.) in thin films during physical vapor deposition
  • Construct virtual structure zone diagrams to predict thin film microstructures for improved advanced materials design

Innovation

  • Development of descriptive models that incorporates simultaneous thin film growth and microstructure evolution
  • Construction of virtual SZDs for polymorphic & polycrystalline materials

Approach

  • Models are developed using the phase-field methodology: field variables describe physical quantities of system with evolution described by conserved or non-conserved differential equations
  • PVD simulations are performed with various substrate temperatures, phase distributions, grain sizes, and vapor flux rates

Key Results

  • PVD and grain evolution models have been coupled together — columnar & porous growth of a polycrystalline material below
  • Developed novel free energy functional for PVD

Conclusions

  • Current models capture arbitrary surface formation, shadowing effects, incident vapor fluxes, grain coarsening, GB migration, solid state phase transformations, phase nucleation, temperature evolution and latent heat release / consumption

Future Work

  • Dimensionalize novel free energy functional to determine length and times scales for experimental comparison
  • Extend novel free energy functional to include: anisotropic growth kinetics, multiple phases, and temperature evolution